JEOL JSM-840 SEM

JEOL JSM-840 SEM

The JEOL JSM-840 is a multi-purpose SEM capable of acceleration voltages up to 40kV. The system has been under a service contract from JEOL USA its entire time. This SEM features an Orion digital image capture system running on Win98, an EDS system making it suitable for elemental analysis, BSE, and a new NanoMaker Pattern Generator system with beam blanker for electron beam lithography to manufacture nano-scaled patterns.

Type Resolution Sample Options
W 4nm 4” max., 15mm X, 25mm Y, 31mm Z EDS, BSE, Beam Blanker, NM PG, Orion digital imaging
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